The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 06, 2025

Filed:

Mar. 05, 2020
Applicant:

Samsung Display Co., Ltd., Yongin-Si, KR;

Inventors:

Dong Eon Lim, Cheonan-si, KR;

Sung Yong Kang, Asan-si, KR;

Youngsik Kim, Cheonan-si, KR;

Jisoo Kim, Goyang-si, KR;

Hyunjin Kim, Ansan-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2005.12); B23K 26/00 (2013.12); G02B 17/00 (2005.12); G02B 27/10 (2005.12); G02B 27/14 (2005.12);
U.S. Cl.
CPC ...
B23K 26/009 (2012.12); G02B 27/106 (2012.12); G02B 27/144 (2012.12); G02B 27/145 (2012.12);
Abstract

A laser annealing device includes a laser generator, a beam splitter, a λ/2 phase difference member, a first reflective member, and a second reflective member. The laser generator emits a laser beam. The beam splitter splits the laser beam into a first reflective light and a transmissive light. The λ/2 phase difference member changes a polarization component of the transmissive light. The first reflective member reflects the transmissive light having the changed polarization component. The second reflective member reflects the transmissive light having the changed polarization component in a way such that the transmissive light having the changed polarization component which is reflected from the first reflective member is incident to the beam splitter.


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