The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 29, 2025

Filed:

Jul. 20, 2021
Applicant:

Innoscience (Suzhou) Technology Co., Ltd., Suzhou, CN;

Inventors:

Yi-Lun Chou, Suzhou, CN;

Kye Jin Lee, Suzhou, CN;

Han-Chin Chiu, Suzhou, CN;

Xiuhua Pan, Suzhou, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10D 30/47 (2024.12); H01L 23/31 (2005.12); H10D 62/17 (2024.12); H10D 62/824 (2024.12); H10D 62/85 (2024.12); H10D 62/854 (2024.12); H01L 23/29 (2005.12);
U.S. Cl.
CPC ...
H10D 30/475 (2024.12); H01L 23/3171 (2012.12); H01L 23/3192 (2012.12); H10D 62/343 (2024.12); H10D 62/357 (2024.12); H10D 62/824 (2024.12); H10D 62/8503 (2024.12); H10D 62/854 (2024.12); H01L 23/291 (2012.12);
Abstract

A semiconductor device includes a nucleation layer, a buffer layer, a first nitride-based semiconductor layer, a second nitride-based semiconductor layer, S/D electrodes, and a gate electrode. The nucleation layer includes a composition that includes a first element. The buffer layer includes a III-V compound which includes the first element. The buffer layer has a concentration of the first element oscillating within the buffer layer, such that the concentration of the first element varies as an oscillating function of a distance within a thickness of the buffer layer. A first oscillation rate between a first reference point and a second reference point within the buffer layer is less than a second oscillation rate between the second reference point and a third reference point within the buffer layer. The first and second nitride-based semiconductor layer, S/D electrodes, and a gate electrode are disposed on the buffer layer.


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