Three-dimensional memory device containing deformation resistant trench fill structure and methods of making the same

Abstract

A semiconductor structure includes an alternating stack of insulating layers and electrically conductive layers, a dielectric moat fill structure that includes a nested structure including, from outside to inside, an outer dielectric liner having a first Young's modulus, an outer material layer having a second Young's modulus greater than the first Young's modulus, a dielectric fill material portion, an inner material layer having the second Young's modulus, and an inner dielectric liner having the first Young's modulus, a vertically alternating sequence of insulating plates and dielectric material plates at least partially laterally surrounded by the dielectric moat fill structure, and an interconnection via structure vertically extending the vertically alternating sequence.