The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2025
Filed:
Apr. 23, 2021
Applicant:
Tescan Brno S.r.o., Brno, CZ;
Inventor:
Jiri Dluhos, Brno, CZ;
Assignee:
Tescan Brno s.r.o., Brno, CZ;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/147 (2005.12); H01J 37/20 (2005.12); H01J 37/28 (2005.12);
U.S. Cl.
CPC ...
H01J 37/1474 (2012.12); H01J 37/20 (2012.12); H01J 37/28 (2012.12); H01J 2237/1536 (2012.12);
Abstract
A sample display method by means of a scanning electron microscope comprises at most one active objective lens located above a first scanning element and a second scanning element. A primary electron beam is deflected so as to be focused by an objective lens so that the beam propagates from the second scanning element towards a sample approximately parallel to the SEM optical axis, wherein the sample is also tilted relative to the SEM optical axis by an angle other than 90°, or it is a sample with distinct topography.