The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2025
Filed:
Aug. 23, 2022
Applicant:
Ketek Gmbh Halbleiter-und Reinraumtechnik, Munich, DE;
Inventors:
Felix Düsberg, Munich, DE;
Florian Schneider, Munich, DE;
Michael Bachmann, Munich, DE;
Andreas Pahlke, Brunnthal, DE;
Assignee:
KETEK GmbH Halbleiter-und Reinraumtechnik, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 5/18 (2005.12); H01J 35/18 (2005.12);
U.S. Cl.
CPC ...
H01J 35/186 (2019.04); H01J 5/18 (2012.12); H01J 2235/083 (2012.12); H01J 2235/084 (2012.12); H01J 2235/183 (2012.12);
Abstract
In at least one embodiment an X-ray source includes an electron source configured to emit electrons, an acceleration set-up configured to accelerate the emitted electrons and a transmission window downwards of the acceleration set-up, the transmission window configured to let through X-rays generated by the accelerated electrons, wherein the transmission window incudes a carbon carrier, and wherein the carbon carrier includes sp2-hybridized carbon.