The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 29, 2025

Filed:

Feb. 17, 2023
Applicants:

Mitsubishi Heavy Industries, Ltd., Tokyo, JP;

Riken, Saitama, JP;

Inventors:

Syusaku Yamamoto, Tokyo, JP;

Keisuke Kajikawa, Tokyo, JP;

Yuichiro Kamino, Tokyo, JP;

Hiroaki Minamide, Saitama, JP;

Koji Nawata, Saitama, JP;

Assignees:

MITSUBISHI HEAVY INDUSTRIES, LTD., Tokyo, JP;

RIKEN, Saitama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/21 (2005.12); G01N 21/3581 (2013.12); G01N 21/47 (2005.12);
U.S. Cl.
CPC ...
G01N 21/3581 (2012.12); G01N 21/21 (2012.12); G01N 2021/216 (2012.12); G01N 2021/4709 (2012.12); G01N 2021/4792 (2012.12);
Abstract

An inspection device includes: a light source for outputting pulsed excitation light with a time width of 10 picoseconds to 10 nanoseconds; a nonlinear optical crystal for generating a terahertz wave by optical wavelength conversion of the pulsed excitation light; a polarization part for reflecting at least a part of a reflected wave of the terahertz wave reflected by an inspection target; and a detector for detecting the reflected wave reflected by the polarization part.


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