The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 29, 2025

Filed:

Aug. 17, 2022
Applicant:

Invensense, Inc., San Jose, CA (US);

Inventors:

Jeremy Parker, Chelmsford, MA (US);

Nishit Goel, San Jose, CA (US);

Stephen Bart, West Newton, MA (US);

Assignee:

InvenSense, Inc., San Jose, CA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/17 (2005.12); B81B 7/02 (2005.12);
U.S. Cl.
CPC ...
G01N 21/1702 (2012.12); B81B 7/02 (2012.12); B81B 2203/0127 (2012.12); G01N 2021/1704 (2012.12); G01N 2201/1218 (2012.12);
Abstract

A bi-directional photoacoustic gas sensor includes a first photoacoustic cell, where an electromagnetic radiation source emits radiation to interact with an external gas and generate pressure waves that are detected by a MEMS diaphragm. A second photoacoustic cell has an interior volume and acoustic compliance that corresponds to the interior volume and acoustic compliance of the first photoacoustic cell. Processing circuitry within a substrate uses a first acoustic signal, received by the first photoacoustic cell, and a second acoustic signal, received by the second photoacoustic cell, to determine a bi-directional response of the gas sensor to remove noise and improve the sensor's signal-to-noise ratio.


Find Patent Forward Citations

Loading…