The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2025
Filed:
Sep. 30, 2020
Applicants:
SK Specialty Co., Ltd., Yeongju-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Sunhye Hwang, Hwaseong-si, KR;
Wonwoong Chung, Incheon, KR;
Younjoung Cho, Hwaseong-si, KR;
Youngha Song, Cheonan-si, KR;
Yonghun Shin, Yeongju-si, KR;
Byungkil Lee, Yeongju-si, KR;
Sungdo Lee, Yeongju-si, KR;
Jinhee Lee, Suwon-si, KR;
Assignees:
Samsung Electronics Co., Ltd., , KR;
SK Specialty Co., Ltd., , KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/24 (2005.12); C23C 16/455 (2005.12); F17C 1/00 (2005.12); F17C 1/14 (2005.12);
U.S. Cl.
CPC ...
F17C 1/14 (2012.12); C23C 14/246 (2012.12); C23C 16/45544 (2012.12); C23C 16/45561 (2012.12); F17C 1/005 (2012.12);
Abstract
A deposition system and a gas storage device, the deposition system including a process chamber; and a gas supply outside of the process chamber, the gas supply being configured to provide monochlorosilane, wherein the gas supply includes a cabinet; and a gas container inside the cabinet, and the gas container includes aluminum (Al).