The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2025
Filed:
Jul. 27, 2021
Edwards Limited, Burgess Hill, GB;
Andrew James Seeley, Burgess Hill, GB;
Stephen Bruce Cottle, Burgess Hill, GB;
Neil Condon, Burgess Hill, GB;
Christopher Mark Bailey, Burgess Hill, GB;
Julian Richard Dean, Burgess Hill, GB;
Joanne Rachel Greenwood, Burgess Hill, GB;
Zachary William Dunbar, Sanborn, NY (US);
Edwards Limited, Burgess Hill, GB;
Abstract
A system comprising a pumping system configured to pump respective exhaust gases from each of a plurality of chemical etching process chambers and to combine the exhaust gases to provide a combined exhaust gas, and a noble gas recovery system configured to process the combined exhaust gas to remove one or more noble gases therefrom.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile