The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2025
Filed:
Jan. 04, 2024
Applicant:
Mico Ceramics Ltd., Anseong-si, KR;
Inventors:
Jusung Lee, Anseong-si, KR;
Yubin Lee, Anseong-si, KR;
Haneum Bae, Anseong-si, KR;
Sungho Lee, Anseong-si, KR;
Assignee:
MiCo Ceramics Ltd., Anseong-si, KR;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2005.12); H01J 37/32 (2005.12); H01T 23/00 (2005.12);
U.S. Cl.
CPC ...
H01L 21/6838 (2012.12); H01J 37/32724 (2012.12); H01J 37/32816 (2012.12); H01L 21/6833 (2012.12); H01J 2237/182 (2012.12); H01J 2237/2007 (2012.12);
Abstract
The present disclosure relates to a ceramic susceptor, and the ceramic susceptor according to the present disclosure includes: an insulation plate on which an electrode is disposed; a shaft connected to the insulation plate; and a power supply rod connected to the electrode and extending through an inner space of the shaft, wherein the insulation plate includes a first through-passage formed through the upper surface and the lower surface thereof and configured to communicate the inner space of the shaft therewith.