The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2025
Filed:
Dec. 21, 2020
Applicant:
Persimmon Technologies Corporation, Wakefield, MA (US);
Inventors:
Christopher Hofmeister, Hampstead, NH (US);
Martin Hosek, Salem, NH (US);
Assignee:
Permission Technologies Corporation, Wakefield, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2005.12); B25J 9/04 (2005.12);
U.S. Cl.
CPC ...
H01L 21/67742 (2012.12); B25J 9/042 (2012.12); Y10S 901/27 (2012.12);
Abstract
A transport apparatus including a robot drive; an arm having a first end connected to the robot drive; and at least one end effector connected to a second end of the arm. The arm includes at least three links connected in series to form the arm. The arm is configured to be moved by the robot drive to move the at least one end effector among load locks and two or more sets of opposing process modules.