The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2025
Filed:
Dec. 05, 2021
Samsung Electronics Co., Ltd., Suwon-si, KR;
Young Wook Kim, Seoul, KR;
Sang Min Kim, Hwaseong-si, KR;
Ji Hun Kim, Uiwang-si, KR;
Gi-Nam Park, Incheon, KR;
Chul-Jun Park, Seoul, KR;
Yong-Jun Ahn, Suwon-si, KR;
Youn Gon Oh, Hwaseong-si, KR;
Byung Kook Yoo, Hwaseong-si, KR;
Hyun Woo Lee, Hwaseong-si, KR;
Jeong Hun Lim, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
A substrate transfer device includes a transfer unit configured to transfer, in a first direction, a carrier in which substrates are stored, an upper interface unit configured to move the transfer unit, a lower interface unit configured to receive the carrier from the transfer unit, and a controller configured to control the upper interface unit and the lower interface unit integrally such that the transfer unit and the carrier move in the first direction at the same time.