The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2025
Filed:
May. 15, 2022
Vat Holding Ag, Haag, CH;
Arthur Büchel, Ruggell, LI;
Adrian Weitnauer, Näfels, CH;
VAT HOLDING AG, Haag, CH;
Abstract
The invention relates to a high-frequency grounding device () for use with a vacuum valve for closing and opening a valve opening of a vacuum chamber system, having a grounding band () made of a conductive material for discharging electrical charges occurring on the vacuum valve, wherein the grounding band has a first end () and a second end () and, for grounding the vacuum valve, is designed to be connected at the first end to a valve closure of the vacuum valve, and to be connected at the second end to a component of the vacuum chamber system, wherein the high-frequency grounding device has a correction impedance, wherein the grounding band is coupled to the correction impedance so that a resonant circuit results, which comprises the grounding band and the correction impedance, and the correction impedance has a first element for shifting a resonant frequency of the resonant circuit and/or a second element for reducing a quality of the resonant circuit. The invention additionally relates to a vacuum valve and a vacuum chamber system having such a high-frequency grounding device.