The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2025
Filed:
Mar. 17, 2020
Hitachi High-tech Corporation, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
There is provided a technique capable of shortening a photographing time and obtaining a more accurate photographed image when photographing a sample SAM using a charged particle beam device. The charged particle beam deviceincludes an electron gun, an objective lens, a stage, detectorsand, an integrated control unit C, a photographing function, and an autofocus function. Each of a plurality of photographing visual fields is focused in a focus value calculation visual fieldadjacent to a designated visual fielddesignated as a photographing target among the plurality of photographing visual fields, and a focus value calculated in the focus value calculation visual fieldis used for calculating focus values of each of the plurality of photographing visual fields.