The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 21, 2025

Filed:

Oct. 27, 2020
Applicant:

Soulbrain Co., Ltd., Gyeonggi-do, KR;

Inventors:

Chang Bong Yeon, Gyeonggi-do, KR;

Jin Hee Kim, Gyeonggi-do, KR;

Jae Sun Jung, Gyeonggi-do, KR;

Seok Jong Lee, Gyeonggi-do, KR;

Assignee:

SOULBRAIN CO., LTD., Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/18 (2005.12); C23C 16/40 (2005.12); C23C 16/455 (2005.12);
U.S. Cl.
CPC ...
C23C 16/18 (2012.12); C23C 16/407 (2012.12); C23C 16/45525 (2012.12);
Abstract

The present invention relates to an indium precursor compound, a method of preparing a thin film using the same, and a board prepared using the same. More particularly, the present invention relates to an indium precursor compound represented by Chemical Formula 1, a method of preparing a thin film using the same, and a board prepared using the same. According to the present invention, a uniform thin film may be formed, productivity may be increased due to an increased deposition rate, thermal stability and storage stability may be excellent, and an effect of easy handling may be obtained.


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