The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 21, 2025

Filed:

Dec. 15, 2022
Applicant:

Lanzhou Institute of Chemical Physics Cas, Gansu, CN;

Inventors:

Li Ji, Gansu, CN;

Xiaohong Liu, Gansu, CN;

Yang Yang, Gansu, CN;

Hongxuan Li, Gansu, CN;

Huidi Zhou, Gansu, CN;

Jianmin Chen, Gansu, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/06 (2005.12); C23C 14/02 (2005.12); C23C 14/34 (2005.12); C23C 14/35 (2005.12); H01J 37/34 (2005.12); C23C 14/50 (2005.12);
U.S. Cl.
CPC ...
C23C 14/0623 (2012.12); C23C 14/022 (2012.12); C23C 14/025 (2012.12); C23C 14/345 (2012.12); C23C 14/35 (2012.12); C23C 14/352 (2012.12); H01J 37/3426 (2012.12); C23C 14/505 (2012.12);
Abstract

The present disclosure relates to a preparation method of a niobium diselenide (NbSe) film with ultra-low friction and low electrical noise under sliding electrical contact in vacuum. The method uses a direct current (DC) closed field magnetron sputtering method for preparation. Through process design of low deposition pressure and low sputtering energy, on one hand, a purity of an NbSesputtered product is kept, generation of interference phases such as NbSeis avoided, and electrical conductivity of the sputtered NbSefilm is greatly improved, and on the other hand, a nanocrystalline/amorphous superlattice composite structure is formed, and excellent mechanical and lubricating properties are achieved. Under sliding electrical contact in vacuum, compared with those of a common electroplated gold coating, a friction coefficient of the film is reduced to 0.02 from 0.25, a wear life is prolonged by at least 7 times, and the electrical noise is reduced by about 50%.


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