The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2025
Filed:
Nov. 21, 2021
Applicant:
Egtm Co., Ltd., Gyeonggi-do, KR;
Inventors:
Assignee:
EGTM Co., Ltd., , KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 7/00 (2005.12); C23C 16/02 (2005.12); C23C 16/455 (2005.12);
U.S. Cl.
CPC ...
C07F 7/00 (2012.12); C23C 16/0218 (2012.12); C23C 16/45534 (2012.12); C23C 16/45553 (2012.12);
Abstract
The present specification provides an organic group 4 metal precursor compound and a method for forming a thin film using the same.