The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2025
Filed:
Oct. 30, 2023
Applicant:
Mico Ceramics Ltd., Anseong-si, KR;
Inventor:
Taekgon Kim, Anseong-si, KR;
Assignee:
MiCo Ceramics Ltd., Anseong-si, KR;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 18/00 (2005.12); C23C 16/06 (2005.12); C23C 16/458 (2005.12);
U.S. Cl.
CPC ...
B32B 18/00 (2012.12); C23C 16/06 (2012.12); C23C 16/4586 (2012.12);
Abstract
Provided is a ceramic susceptor, which includes a ceramic plate with a radio-frequency electrode disposed therein, wherein the ceramic plate includes a connector connected to the radio-frequency electrode, the ceramic susceptor includes a rod having one end connected to the connector to supply power to the radio-frequency electrode, and the rod employs Mo, W, or an alloy thereof as a base material and includes a metal nitride film containing Cr on the surface of the base material.