The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2025
Filed:
Oct. 15, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Vijayabhaskara Venkatagiriyappa, Karnataka, IN;
Nitin Bhargav, San Jose, CA (US);
Tae Kwang Lee, Pleasanton, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/04 (2011.12); B24B 37/20 (2011.12); C23C 16/458 (2005.12);
U.S. Cl.
CPC ...
B24B 37/042 (2012.12); B24B 37/20 (2012.12); C23C 16/4583 (2012.12);
Abstract
Apparatus and method for removing material from the susceptor of a batch processing chamber are described. The apparatus comprises a polishing tool including a rotatable platen positioned above the susceptor. A method comprises contacting material deposited on the susceptor with the rotatable platen to remove the material from the susceptor.
Quick Actions:
Venkatagiriyappa, Vijayabhaskara. (2025). Apparatus and methods for susceptor deposition material removal (U.S. Patent No. 12280465). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12280465
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile