The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2025

Filed:

May. 30, 2023
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventor:

Koichiro Kawasaki, Nagaokakyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/10 (2005.12); H01L 23/02 (2005.12); H01L 23/04 (2005.12); H03H 9/02 (2005.12); H03H 9/05 (2005.12); H03H 9/25 (2005.12); H03H 9/64 (2005.12);
U.S. Cl.
CPC ...
H03H 9/1092 (2012.12); H01L 23/02 (2012.12); H01L 23/04 (2012.12); H03H 9/02897 (2012.12); H03H 9/02937 (2012.12); H03H 9/02984 (2012.12); H03H 9/059 (2012.12); H03H 9/1071 (2012.12); H03H 9/25 (2012.12); H03H 9/6483 (2012.12);
Abstract

An electronic device includes an insulation material layer provided on a first main surface of a piezoelectric substrate and surrounding a functional element, and a protective layer provided on the insulation material layer. The piezoelectric substrate and the insulation material layer define a hollow portion accommodating the functional element. The protective layer includes a first portion above the hollow portion, a second portion adjacent to the first portion at one end of the second portion, and a third portion adjacent to the second portion at another end of the second portion. A distance between the first main surface and a surface of the protective layer in the thickness direction is greatest at a location where the second portion is adjacent to or in a vicinity of the first portion, and the distance is shortest at a location where the second portion is adjacent to or in a vicinity of the third portion.


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