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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12278129 B1

PDFFull Text
Date of Patent:
Apr. 14, 2025

Filed:

Mar. 02, 2021

Alignment fixture for a reactor system

Applicant:

Asm Ip Holding B.v., Almere, NL;

Inventors:

Surojit Ganguli, Tempe, AZ (US);

Todd Robert Dunn, Cave Creek, AZ (US);

Ankit Kimtee, Phoenix, AZ (US);

Assignee:

ASM IP Holding B.V., Almere, NL;

Attorney:

Snell & Wilmer L.L.P.

Primary Examiner:

Jeffrie R Lund

Assistant Examiner:

Tiffany Z Nuckols

Int. Cl.
CPC ...
H01L 21/68 (2005.12); C23C 16/455 (2005.12); C23C 16/458 (2005.12); H01L 21/67 (2005.12); H01L 21/687 (2005.12);
U.S. Cl.
CPC ...
H01L 21/68 (2012.12); C23C 16/45544 (2012.12); C23C 16/4583 (2012.12); H01L 21/67259 (2012.12); H01L 21/68735 (2012.12); H01L 21/67069 (2012.12);
Abstract

An alignment fixture for a reactor system may comprise a fixture body comprising an inner perimeter at least partially defining a shape which comprises an inner space of the fixture body, wherein the inner space is configured to receive a susceptor of a reactor system; and/or a measuring protrusion coupled to the fixture body at a first position and protruding from the fixture body toward the inner space. The measuring protrusion may comprise an indicator between the fixture body and a measuring protrusion end of the measuring protrusion.

Find Patent Forward Citations

Ganguli, Surojit. (2025). Alignment fixture for a reactor system (U.S. Patent No. 12278129). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12278129

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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