The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2025
Filed:
Mar. 02, 2021
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Surojit Ganguli, Tempe, AZ (US);
Todd Robert Dunn, Cave Creek, AZ (US);
Ankit Kimtee, Phoenix, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2005.12); C23C 16/455 (2005.12); C23C 16/458 (2005.12); H01L 21/67 (2005.12); H01L 21/687 (2005.12);
U.S. Cl.
CPC ...
H01L 21/68 (2012.12); C23C 16/45544 (2012.12); C23C 16/4583 (2012.12); H01L 21/67259 (2012.12); H01L 21/68735 (2012.12); H01L 21/67069 (2012.12);
Abstract
An alignment fixture for a reactor system may comprise a fixture body comprising an inner perimeter at least partially defining a shape which comprises an inner space of the fixture body, wherein the inner space is configured to receive a susceptor of a reactor system; and/or a measuring protrusion coupled to the fixture body at a first position and protruding from the fixture body toward the inner space. The measuring protrusion may comprise an indicator between the fixture body and a measuring protrusion end of the measuring protrusion.