The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2025
Filed:
Oct. 27, 2021
Applied Materials, Inc., Santa Clara, CA (US);
D. Jeffrey Lischer, Acton, MA (US);
Bon-Woong Koo, Andover, MA (US);
Dawei Sun, Lynnfield, MA (US);
Chi-Yang Cheng, West Lebanon, NH (US);
Paul Joseph Murphy, Reading, MA (US);
Frank Sinclair, Boston, MA (US);
Gregory Edward Stratoti, Sandown, NH (US);
Tseh-Jen Hsieh, Rowley, MA (US);
Wayne Chen, Brookline, MA (US);
Guy Oteri, Merrimac, MA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A load lock in which the pumping speed is controlled so as to minimize the possibility of condensation is disclosed. The load lock is in communication with a vacuum pump and a valve. A controller is used to control the valve such that the supersaturation ratio within the load lock does not exceed a predetermined threshold, which is less than or equal to the critical value at which vapor condenses. In certain embodiments, a computer model is used to generate a profile, which may be a pumping speed profile or a pressure profile, and the valve is controlled according to the profile. In another embodiment, the load lock comprises a temperature sensor and a pressure sensor. The controller may calculate the supersaturation ratio based on these parameters and control the valve accordingly.