The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2025
Filed:
Jul. 22, 2021
Applicant:
Beijing Naura Microelectronics Equipment Co., Ltd., Beijing, CN;
Inventors:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., Beijing, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2005.12); C23C 14/35 (2005.12); C23C 16/458 (2005.12); H01J 37/32 (2005.12);
U.S. Cl.
CPC ...
H01J 37/3441 (2012.12); C23C 14/35 (2012.12); C23C 16/4585 (2012.12); H01J 37/32522 (2012.12); H01J 37/32651 (2012.12); H01J 37/3405 (2012.12); H01J 2237/002 (2012.12);
Abstract
A shield cooling assembly includes an adapter configured to fix a shield in the chamber. The adapter includes a first surface and a second surface facing an outer side surface of the shield and a bottom surface of a bottom wall of the shield, respectively. A predetermined gap is provided between the first surface and the outer side surface of the shield. The second surface is in contact with the bottom surface of the bottom wall of the shield. The adapter is provided with a cooling channel for transmitting a cooling medium to cool the shield.