The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2025
Filed:
Nov. 08, 2020
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Il Gyo Koo, Cheonan-si, KR;
Harutyun Melikyan, Cheonan-si, KR;
Hyo Seong Seong, Changwon-si, KR;
Soojin Lee, Seoul, KR;
Assignee:
Semes Co., Ltd., Cheonan-Si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3065 (2005.12); H01J 37/32 (2005.12);
U.S. Cl.
CPC ...
H01J 37/32091 (2012.12); H01J 37/321 (2012.12); H01J 37/3211 (2012.12); H01J 37/32174 (2012.12); H01J 37/32183 (2012.12);
Abstract
Provided are a plasma antenna and a plasma generating apparatus including the same. The plasma antenna includes a first antenna inducing electromagnetic fields by using an RF signal, a second antenna inducing electromagnetic fields by using the RF signal, and a capacitor connected between an input terminal of the first antenna and an input terminal of the second antenna.