The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2025
Filed:
Feb. 23, 2022
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Sukjong Bae, Seoul, KR;
Johan Hofkens, Leuven, BE;
Haifeng Yuan, Leuven, BE;
Flip de Jong, Leuven, BE;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2005.12); G01N 21/64 (2005.12); G03F 1/86 (2011.12); G03F 7/00 (2005.12); G03F 7/22 (2005.12); G01N 21/956 (2005.12);
U.S. Cl.
CPC ...
G03F 1/86 (2012.12); G01N 21/64 (2012.12); G03F 7/2004 (2012.12); G03F 7/70916 (2012.12); G01N 2021/95676 (2012.12);
Abstract
According to example embodiments, there is provided a photoresist inspection method. The photoresist inspection method includes: providing a photoresist on a substrate; irradiating the photoresist with an electron beam and an excitation beam; detecting fluorescent light generated by the photoresist in response to the excitation beam; and evaluating the photoresist based on the fluorescent light.