The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2025
Filed:
Jun. 30, 2016
Integrated connector between first and second vacuum pumps creating a vapor phase region environment
Edwards Japan Limited, Chiba, JP;
Takashi Kabasawa, Chiba, JP;
Manabu Nonaka, Chiba, JP;
Edwards Japan Limited, Chiba, JP;
Abstract
An exhausting system capable of preventing gas condensation and early overheat in a vacuum pump without causing an increase in the costs of the entire exhausting system and suitable for relaxing the operable conditions of the entire exhausting system including a flow rate at which gas is successively exhausted. An exhausting system is predicated on a constitution including: at least a first vacuum pump and a second vacuum pump connected in series; and a connecting portion disposed therebetween, the exhausting system exhausting gas containing a condensable gas via the vacuum pumps and the connecting portion. In the exhausting system, an environment inside the connecting portion is set to an environment having a vapor phase region below a vapor pressure curve of the condensable gas flowing through an inside of the connecting portion by providing the second vacuum pump near the first vacuum pump.