The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2025
Filed:
Oct. 06, 2021
Applicant:
Von Ardenne Asset Gmbh & Co. KG, Dresden, DE;
Inventors:
Christoph Kaiser, Dresden, DE;
Carsten Deus, Dresden, DE;
Markus Berendt, Radeberg, DE;
Matthias Smolke, Dresden, DE;
Knut Barthel, Dresden, DE;
Michael Hentschel, Dresden, DE;
Assignee:
VON ARDENNE Asset GmbH &Co. KG, Dresden, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/56 (2005.12); B65G 13/04 (2005.12); B65G 21/20 (2005.12); B65G 27/18 (2005.12); C23C 14/34 (2005.12); C23C 14/50 (2005.12);
U.S. Cl.
CPC ...
C23C 14/562 (2012.12); B65G 13/04 (2012.12); B65G 21/2045 (2012.12); B65G 27/18 (2012.12); C23C 14/34 (2012.12); C23C 14/3407 (2012.12); C23C 14/505 (2012.12); B65G 2201/0276 (2012.12);
Abstract
Disclosed herein are systems, methods, and devices for transporting substrates. A transport device may include a plurality of rotational bodies, where each rotational body is rotatably attached for transporting a rod-shaped workpiece. The transport device may include a rotational excitation element configured to excite rotation of the workpiece when it is supported on one of the plurality of rotational bodies.