The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2025
Filed:
Jul. 20, 2021
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventor:
Franz Michael Darrer, Graz, AT;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02K 33/00 (2005.12); B81B 7/00 (2005.12); B81B 7/02 (2005.12); H02N 1/00 (2005.12); H02P 1/00 (2005.12); H02P 3/00 (2005.12); H02P 5/00 (2015.12); G02B 26/08 (2005.12); G05B 11/01 (2005.12); G09G 3/02 (2005.12);
U.S. Cl.
CPC ...
B81B 7/02 (2012.12); B81B 7/008 (2012.12); H02N 1/008 (2012.12); G02B 26/085 (2012.12); G05B 11/01 (2012.12); G05B 2219/41344 (2012.12); G09G 3/025 (2012.12);
Abstract
A method comprises applying a driver voltage to an electrostatic comb drive of an MEMS apparatus and overlaying the driver voltage with a periodic voltage signal. The method further comprises determining a torsion angle of a mirror body of the MEMS apparatus based on the periodic voltage signal.