Silicon carbide semiconductor device

Abstract

In an intermediate region surrounding a periphery of an active region, a gate polysilicon wiring layer is provided on a gate insulating film at a front surface of a semiconductor substrate, via a field oxide film. An inner end portion of the gate polysilicon wiring layer faces a p-type region of a surface region at the front surface of the semiconductor substrate, via only the gate insulating film. In the intermediate region, at corners thereof facing corners of the active region, a low carrier lifetime region containing a carrier lifetime killer is provided so as to overlap the p-regions and, in a depth direction, face the gate polysilicon wiring layer, whereby the lifetime of the minority carriers of the corner portions of the intermediate region is shorter than the lifetime of the minority carriers of linear portions of the intermediate region.