The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2025
Filed:
Aug. 21, 2020
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Bin Luo, Beaverton, OR (US);
Andrew H. Breninger, Hillsboro, OR (US);
John Michael Wiltse, Lake Oswego, OR (US);
Brian Lewis Ratliff, Hillsboro, OR (US);
David James Shusteric, San Jose, CA (US);
Assignee:
LAM RESEARH CORPORATION, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); G02B 7/00 (2021.01);
U.S. Cl.
CPC ...
H01J 37/32935 (2013.01); G02B 7/007 (2013.01); H01J 37/32798 (2013.01); H01J 37/32091 (2013.01);
Abstract
Plasma viewports for high-temperature environments in semiconductor processing equipment are disclosed; such viewports may use a triple-window design, with each window providing particular functionality.