The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2025
Filed:
May. 11, 2023
Applicant:
Ketek Gmbh Halbleiter-und Reinraumtechnik, Munich, DE;
Inventors:
Michael Bachmann, Munich, DE;
Andreas Schels, Munich, DE;
Florian Herdl, Kiefersfelden, DE;
Stefan Zimmermann, Burgwedel, DE;
Simon Edler, Munich, DE;
Erik Bunert, Langenhagen, DE;
Assignee:
KETEK GmbH Halbleiter-und Reinraumtechnik, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 1/312 (2006.01); C23C 16/26 (2006.01); C23C 16/34 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01J 1/312 (2013.01); C23C 16/26 (2013.01); C23C 16/342 (2013.01); H01J 2201/3125 (2013.01); H01L 21/02527 (2013.01);
Abstract
In an embodiment an ionization detector includes a gate-insulator-substrate electron-emission structure (GIS-EE) configured to emit low-energy electrons, a sample chamber configured for at least one gas to be detected, the sample chamber being adjacent to the GIS-EE and a measuring unit configured to detect and/or select charged particles, wherein the charged particles are due to the emitted electrons and/or comprise the emitted electrons.