The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 08, 2025

Filed:

Feb. 12, 2021
Applicant:

Kelk Ltd., Kanagawa, JP;

Inventor:

Kazuhiro Mimura, Kanagawa, JP;

Assignee:

KELK Ltd., Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 11/42 (2006.01); G05D 23/19 (2006.01); G05D 23/22 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
G05B 11/42 (2013.01); G05D 23/1902 (2013.01); G05D 23/1927 (2013.01); G05D 23/22 (2013.01); H01L 21/683 (2013.01);
Abstract

A temperature control system includes: first adjusting the temperature of fluid in a first portion the fluid having a first temperature determined based on a second temperature higher than the first temperature or the second temperature; second adjusting the temperature of the fluid supplied to a target at a second portion between the first portion and the target; first detecting the temperature of first fluid supplied from the first to second portion; second detecting the temperature of the fluid or the target at a predetermined position between an outlet of the second portion and an inlet of the first portion; controlling the first adjusting based on the first detected value such that the temperature of the first fluid becomes a first temperature; and controlling the second adjusting based on a the second detected such that the temperature of the fluid becomes a second temperature at the predetermined position.


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