The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 08, 2025

Filed:

Jul. 27, 2021
Applicant:

Lynred, Palaiseau, FR;

Inventors:

Willy Ludurczak, Lyons, FR;

Marc Guillaumont, Grenoble, FR;

Assignee:

LYNRED, Palaiseau, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/08 (2022.01); G01J 5/02 (2022.01); G01J 5/20 (2006.01);
U.S. Cl.
CPC ...
G01J 5/0853 (2013.01); G01J 5/024 (2013.01); G01J 5/20 (2013.01);
Abstract

An infrared imaging microbolometer integrating a membrane assembled in suspension above a substrate by means of holding arms attached to anchoring nails is disclosed. The membrane includes a support layer crossing the upper end of the anchoring nails. It also includes an absorber or electrode deposited on the support layer and on the anchoring nails with a pattern forming at least two electrodes. It further includes a dielectric layer deposited on the absorber or electrode and on the support layer, at least two conductive vias formed through the dielectric layer in contact with the at least two electrodes, and a thermometric or thermoresistive material arranged on a planar surface formed at the level of the upper ends of the conductive vias.


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