The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2025
Filed:
Feb. 10, 2022
The Hong Kong University of Science and Technology, Hong Kong, CN;
Kei May Lau, Hong Kong, CN;
Renqiang Zhu, Hong Kong, CN;
The Hong Kong University of Science and Technology, Hong Kong, CN;
Abstract
GaN vertical trench MOSFETs and methods of manufacturing the same are disclosed. One example embodiment is a vertical trench MOSFET. The MOSFET includes a semiconductor transistor that has a first surface and a second surface, and a trench that extends from the first surface into the semiconductor transistor along a first direction perpendicular to the first and second surfaces. The semiconductor transistor includes a body region having a channel region arranged along the first direction along at least a portion of a wall of the trench. The doping concentration of the channel region is non-uniform. As a non-limiting example, two-step doping is conducted for forming asymmetric or non-uniform channel of a GaN vertical trench MOSFET. In some embodiments, multiple-step doping other than the two-step doing (such as doping in three steps, four steps, or more), linearly scaled doping, other proper asymmetric doping can be used.