The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2025
Filed:
Aug. 10, 2021
Applicant:
Ngk Insulators, Ltd., Nagoya, JP;
Inventors:
Assignee:
NGK INSULATORS, LTD., Nagoya, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05B 3/28 (2006.01); C04B 35/64 (2006.01); H01L 21/02 (2006.01); H01L 21/683 (2006.01); H05B 3/06 (2006.01); H05B 3/16 (2006.01); H05B 3/18 (2006.01);
U.S. Cl.
CPC ...
H05B 3/283 (2013.01); C04B 35/64 (2013.01); H01L 21/02 (2013.01); H01L 21/683 (2013.01); H05B 3/06 (2013.01); H05B 3/16 (2013.01); H05B 3/18 (2013.01); H05B 2203/017 (2013.01);
Abstract
A ceramic heater includes: a ceramic plate which is provided with a wafer placement surface on an upper surface and in which a heating resistor is internally embedded; a ceramic tubular shaft with an upper end bonded to a lower surface of the plate; and power feeding members which penetrate a peripheral wall part of the tubular shaft in a vertical direction, and are electrically connected to the heating resistor. The power feeding members are embedded in the peripheral wall part of the tubular shaft, and are in tight contact with a ceramic material of the tubular shaft.