The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2025
Filed:
Jul. 26, 2022
Aac Kaitai Technologies (Wuhan) Co., Ltd, Hubei, CN;
Zhao Ma, Shenzhen, CN;
Zhan Zhan, Shenzhen, CN;
Shan Yang, Shenzhen, CN;
Xiao Kan, Shenzhen, CN;
Shitao Yan, Shenzhen, CN;
Yang Li, Shenzhen, CN;
Hongtao Peng, Shenzhen, CN;
Kahkeen Lai, Singapore, SG;
Veronica Tan, Singapore, SG;
Yan Hong, Shenzhen, CN;
AAC Kaitai Technologies (Wuhan) CO., LTD, Wuhan, CN;
Abstract
The invention discloses a MEMS gyroscope, including a substrate, a first unit and a second unit, and the first unit and the second unit are relatively arranged on the substrate along the first direction. The first unit is connected to the second unit through a coupling spring, and the substrate is also provided with a driving electrode and a detection electrode. The first unit includes a first weight and a second weight. The second unit includes the third weight and the fourth weight set oppositely along the second direction. The second set of coupling structures are connected to the third weight and fourth weight. Compared with the prior art, the beneficial effect of the present invention is that the MEMS gyroscope adopts a symmetrical layout, which facilitates the realization of differential detection and improves the sensitivity.