The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 01, 2025

Filed:

May. 16, 2022
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Masamichi Ueno, Tochigi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16F 7/10 (2006.01); F16F 7/108 (2006.01); F16F 15/02 (2006.01);
U.S. Cl.
CPC ...
F16F 7/1017 (2013.01); F16F 7/1011 (2013.01); F16F 7/108 (2013.01); F16F 15/022 (2013.01); F16F 2222/08 (2013.01); F16F 2228/066 (2013.01); F16F 2230/18 (2013.01);
Abstract

A vibration damping apparatus configured to damp a vibration of a target member includes a mass body, a base disposed on the target member, a support member disposed on the base and configured to support the mass body, a housing disposed on the base so as to surround the support member, an elastic member disposed so as to form a space in the housing and configured to apply a force to the support member, and a control unit configured to control a pressure of a fluid in the space by supplying the fluid to the space based on a vibration state of the target member.


Find Patent Forward Citations

Ueno, Masamichi. (2025). Vibration damping apparatus, reaction force processing system, stage apparatus, exposure apparatus, substrate processing device, and method for manufacturing article (U.S. Patent No. 12264722). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12264722

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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