The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2025
Filed:
Aug. 23, 2021
Canon Kabushiki Kaisha, Tokyo, JP;
Hiroshi Sato, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A substrate processing method includes a first process configured to process a substrate with a top plate disposed nearer an upper surface of the substrate, the substrate being held by a substrate holding unit of a first substrate holding apparatus, a second process configured to raise the substrate with the top plate disposed on the first substrate holding apparatus to make a space between the substrate holding unit and the substrate, a third process configured to insert a substrate conveyance apparatus for conveying the substrate with the top plate disposed on the first substrate holding apparatus to a second substrate holding apparatus into the space, and a fourth process configured to convey the substrate to the second substrate holding apparatus.