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H10K 71/20 (2023.01); H10K 50/11 (2023.01); H10K 50/813 (2023.01); H10K 50/844 (2023.01); H10K 59/12 (2023.01); H10K 71/00 (2023.01); H10K 71/40 (2023.01); H10K 71/60 (2023.01);

U.S. Cl.

CPC ...

H10K 71/233 (2023.02); H10K 50/11 (2023.02); H10K 50/813 (2023.02); H10K 50/844 (2023.02); H10K 59/12 (2023.02); H10K 71/00 (2023.02); H10K 71/40 (2023.02); H10K 71/60 (2023.02); H10K 59/1201 (2023.02);

Abstract

A display device that can easily have high resolution is provided. A display device having both high display quality and high resolution is provided. A display device with high contrast is provided. A first EL film is deposited in contact with a top surface and a side surface of each of a first pixel electrode and a second pixel electrode each having a tapered shape. A first sacrificial film is formed to cover the first EL film. The first sacrificial film and the first EL film are etched to expose the second pixel electrode and form a first EL layer over the first pixel electrode and a first sacrificial layer over the first EL layer, and then, the first sacrificial layer is removed. The first EL film and the second EL film are etched by dry etching. The first sacrificial layer is removed by wet etching.

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