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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12261047 B1

PDFFull Text
Date of Patent:
Mar. 25, 2025

Filed:

Aug. 05, 2022

Doping techniques

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Wolfgang Aderhold, Cupertino, CA (US);

Yi-Chiau Huang, Fremont, CA (US);

Wei Liu, San Jose, CA (US);

Benjamin Colombeau, San Jose, CA (US);

Abhilash Mayur, Salinas, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Servilla Whitney LLC

Primary Examiner:

Kyoung Lee

Assistant Examiner:

David J Goodwin

Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/225 (2006.01); H01L 21/324 (2006.01); H01L 21/02 (2006.01); H10B 41/27 (2023.01); H10B 43/27 (2023.01);
U.S. Cl.
CPC ...
H01L 21/2255 (2013.01); H01L 21/324 (2013.01); H01L 21/02269 (2013.01); H10B 41/27 (2023.02); H10B 43/27 (2023.02);
Abstract

A method of selectively and conformally doping semiconductor materials is disclosed. Some embodiments utilize a conformal dopant film deposited selectively on semiconductor materials by thermal decomposition. Some embodiments relate to doping non-line of sight surfaces. Some embodiments relate to methods for forming a highly doped crystalline semiconductor layer.

Find Patent Forward Citations

Aderhold, Wolfgang. (2025). Doping techniques (U.S. Patent No. 12261047). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12261047

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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