The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2025
Filed:
Aug. 11, 2021
Applicant:
Kioxia Corporation, Tokyo, JP;
Inventor:
Toshiaki Komukai, Kanagawa, JP;
Assignee:
KIOXIA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/075 (2006.01); G03F 7/20 (2006.01); G03F 9/00 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
G03F 9/7042 (2013.01); G03F 7/075 (2013.01); G03F 7/2012 (2013.01); H01L 21/027 (2013.01);
Abstract
A template includes: a base material having a principal surface; a mesa structure provided on the principal surface and having a first surface; and a silicon film that is provided on the first surface of the mesa structure, has a projection-and-depression pattern, and is made of a material different from a material for the base material.
Quick Actions:
Komukai, Toshiaki. (2025). Template, method for fabricating template, and method for fabricating semiconductor device (U.S. Patent No. 12259663). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12259663
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile