The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2025
Filed:
Feb. 24, 2023
Christos Tsironis, St-Laurent, CA;
Christos Tsironis, Kirkland, CA;
Christos Tsironis, St-Laurent, CA;
Abstract
A low profile four probe harmonic load-pull slide screw impedance tuner uses four tuning probes sharing the same slabline; they are inserted in pairs diametrically at fixed depth (distance from the center conductor) from both sides into the channel and move only horizontally along the slabline. The tuner does not have adjustable vertical axes controlling the penetration of the tuning probes and its low profile is optimal for on-wafer operations with direct wafer probe contact. The carriages holding the tuning probes are moved at high speed along the slabline using linear electric actuators. The 'S' shaped center conductor allows for a neutral, probe withdrawn, 50 Ohm state. A fast de-embedding calibration method allows speeding up the measurement procedure.