The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2025
Filed:
Oct. 10, 2023
Applicant:
Northeastern University, Boston, MA (US);
Inventors:
Cristian Cassella, Boston, MA (US);
Xuanyi Zhao, Brookline, MA (US);
Assignee:
Northeastern University, Boston, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 3/04 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/56 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02031 (2013.01); H03H 3/04 (2013.01); H03H 9/13 (2013.01); H03H 9/176 (2013.01); H03H 9/568 (2013.01); H03H 2003/0435 (2013.01);
Abstract
A microelectromechanical resonator device is provided having two-dimensional resonant rods. The resonator device has a piezoelectric layer formed with a plurality of alternating rods and trenches. A bottom electrode is in contact with a bottom surface of the piezoelectric layer. A top electrode metal grating of conductive strips is aligned in contact with corresponding rods of the piezoelectric layer.