The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2025
Filed:
Jun. 08, 2021
Samsung Electronics Co., Ltd., Suwon-si, KR;
Gaurav Kumar, Bengaluru, IN;
Lakshmi Narayana Pedapudi, Bengaluru, IN;
Sameera Bharadwaja Hayavadana, Bengaluru, IN;
Sathyanarayanan Kulasekaran, Bengaluru, IN;
Shashank Shrikant Agashe, Bengaluru, IN;
Wan Sung Park, Seoul, KR;
Sung Ha Kim, Suwon-si, KR;
Abstract
Example embodiments may provide methods for determining a quality of a film in spin coating process. The methods may include capturing images of portions of the film using an imaging device while coating the film on a substrate using a spinner. The imaging device may include SPCs and lens and/or SLMs. The methods may also include determining whether a characteristic of the film matches to a standard based on the images of the portions of the film. The method may further include performing detecting that the quality of the film is optimal in response to determining that the characteristic of the film matches to the standard or detecting that the quality of the film is not optimal in response to determining that the characteristic of the film does not match to the standard.