The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2025
Filed:
Feb. 27, 2020
Applied Materials Italia S.r.l., San Biagio di Callalta, IT;
Daniele Andreola, Povegliano, IT;
Giorgio Cellere, Torri di Quartesolo, IT;
Alvise Fecchio, San Biagio di Callalta, IT;
Valentina Furin, Piazzola Sul Brenta, IT;
Enrico Pasqualetto, Castelfranco Veneto, IT;
Alessio Zanchettin, Revine Lago, IT;
Marco Galiazzo, Quinto di Treviso, IT;
APPLIED MATERIALS ITALIA S.R.L., San Biagio di Callalta, IT;
Abstract
A support device includes a substrate receiving region. The support device includes a support body shaped as a pattern having an array of openings. The support body is a sparse structure wherein a joint area of the openings of the array of openings is 40% or more of the area of the substrate receiving region. The support body includes one or more suction openings configured to be in fluid communication with a vacuum source arrangement.