The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2025
Filed:
Jul. 01, 2022
Samsung Electronics Co., Ltd., Suwon-si, KR;
Do-Nyun Kim, Seoul, KR;
Min-Cheol Kang, Hwaseong-si, KR;
Kihyun Kim, Seongnam-si, KR;
Jaehoon Kim, Seoul, KR;
Jaekyung Lim, Seoul, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Seoul National University R&DB Foundation, Seoul, KR;
Abstract
Disclosed is an operating method of an electronic device for manufacture of a semiconductor device. The method includes receiving, at the electronic device, a computer-aided design (CAD) image for a lithography process of the semiconductor device, and generating, at the electronic device, a first scanning electron microscope (SEM) image and a first segment (SEG) image from the CAD image by using a machine learning-based module, and the first SEG image includes information about a location of a defect.