The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2025
Filed:
Oct. 29, 2021
Edwards Japan Limited, Yachiyo, JP;
Haruki Suzuki, Yachiyo, JP;
Edwards Japan Limited, Yachiyo, JP;
Abstract
A vacuum pump having excellent exhaust performance is provided. The vacuum pump includes a Siegbahn type exhaust mechanism portionin which a Siegbahn spiral groove portionis provided in at least either rotating discstoor stator discsand, and a Holweck type exhaust mechanism portionin which a thread grooveis provided in at least either a cylindrical portionof a rotating bodyor a threaded spacer, and the Holweck type exhaust mechanism portionis located on the downstream side of the Siegbahn type exhaust mechanism portion. The Holweck type exhaust mechanism portionhas a flow passage depth that is continuously constant at a predetermined depth H, and the Siegbahn type exhaust mechanism portionincludes a region that is continuously constant at the predetermined depth Hfrom a predetermined position.