The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2025
Filed:
Nov. 16, 2021
Applicant:
Sti Co., Ltd., Anseong-si, KR;
Inventors:
Assignee:
STI Co., Ltd., Anseong-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/02 (2006.01); F26B 3/04 (2006.01); F26B 3/30 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
B08B 3/02 (2013.01); F26B 3/04 (2013.01); F26B 3/30 (2013.01); G03F 7/70925 (2013.01); B08B 2230/01 (2013.01);
Abstract
Proposed is a POD cleaning process including: separating an introduced POD into an inner POD and an outer POD; cleaning a separation POD, which results from the separation, within a cleaning sub-chamber; drying the separation POD, which undergoes the cleaning, within a drying chamber; vacuum-processing the separation POD undergoing the drying; and assembling the inner POD and the outer POD that undergo the vacuum processing, in which the cleaning and the drying are separately performed.