The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2025
Filed:
Jun. 09, 2022
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventors:
Kazuki Nakamura, Kyoto, JP;
Junichi Ishii, Kyoto, JP;
Tomoyuki Shinohara, Kyoto, JP;
Takuma Takahashi, Kyoto, JP;
Assignee:
SCREEN Holdings Co., Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 1/00 (2024.01); B08B 1/12 (2024.01); B08B 1/50 (2024.01); B08B 3/02 (2006.01);
U.S. Cl.
CPC ...
B08B 1/50 (2024.01); B08B 1/12 (2024.01); B08B 3/02 (2013.01);
Abstract
A substrate is held in a horizontal attitude by a substrate holder. At a processing position, a lower surface of the substrate held by the substrate holder is cleaned by a lower-surface brush. The lower-surface brush is cleaned by a brush cleaner at a waiting position that overlaps with the substrate held by the substrate holder in an up-and-down direction and is below a processing position. The lower-surface brush is lifted and lowered by a lower-surface brush lifting-lowering driver between the processing position and the waiting position.