The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2025
Filed:
Jan. 26, 2024
Applicant:
Photronics, Inc., Brookfield, CT (US);
Inventors:
Hilario Ar-Miguel Alvarez, Flower Mound, TX (US);
Spencer Allen Mullens, Denison, TX (US);
Jesse Eugene Williams, II, McKinney, TX (US);
Assignee:
PHOTRONICS, INC., Brookfield, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/58 (2012.01); G03F 7/00 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01); B32B 38/10 (2006.01); G03F 1/62 (2012.01); G03F 1/64 (2012.01); G03F 1/82 (2012.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68 (2013.01); H01L 21/682 (2013.01); H01L 21/68742 (2013.01); B32B 38/10 (2013.01); G03F 1/62 (2013.01); G03F 1/64 (2013.01); G03F 1/82 (2013.01); G03F 7/70983 (2013.01); H01L 21/683 (2013.01); Y10T 156/1168 (2015.01);
Abstract
A pellicle removal tool including a stage that holds a photomask and an associated pellicle, two or more arms positioned around the stage and configured to engage pellicle side wells of the pellicle, and two or more actuators each configured to adjust at least a vertical position of a corresponding one of the two or more arms so as to apply a lifting force to the pellicle for removal of the pellicle from the photomask.